Accurate pressure control for vacuum coatings
These mass flow controllers from Alicat Scientific ensure the optimal coating environment in vacuum chambers. The MCE-Series and MCV-Series may be used to replace legacy and discontinued MKS instruments. Made to fit the same space as common industry mass flow controllers, both series are easy to integrate into existing systems. In use, they offer fast, accurate flow control for process uniformity and quality. They accurately control gas flow rates as low as 0-0.5 sccm full scale or as high as 0-20 slpm full scale with control response times of 50 to 100 milliseconds.